Facilities
MBE Veeco GEN930 Reactor
The GEN930 system gives you maximum flexibility in materials research. Its geometry, unique cryopanel, and numerous ports for integrating today’s leading edge in situ analytical tools ensure material purity. The reliability of the system has been proven in many of the leading material research laboratories around the world.
The main components of the GEN930 system are:
UHV Growth Chamber
Buffer Chamber
Load Lock Chamber
Pumping System(s)
GEN II Wafer Transport System
Source Flange
Substrate Manipulator
Effusion Cells/Shutters
Electronics
Software
